Processing Techniques Equipment name & NEMO ID Teaser Blurb Cleanliness Location
Stepper ASML PAS 5500/60 i-line Stepper
asml

ASML PAS 5500/60 i-line stepper, automatic for 25 inch wafers,  450nm resolution, 365nm near-UV light

 "All" SNF Paul G Allen L107 Cleanroom