Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
ASML PAS 5500/60 i-line Stepper asml |
Stepper ASML PAS 5500/60 i-line Training | "All" | SNF Paul G Allen L107 Cleanroom |
5:1 reducing stepper |
|
Karl Suss MA-6 Contact Aligner karlsuss |
Contact Aligner Karl Suss MA-6 Training | "All" | SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner. Backside align, including IR. |
|
Karl Suss MA-6 Contact Aligner karlsuss2 |
Contact Aligner Karl Suss MA-6 Training | "All" | SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner. Backside align. |