Sapphire

For more than 300nm deposition, please contact Gabe Catalano <gcatalano@stanford.edu> in advance

5:1 reducing stepper

CO2 drying after release of micromachined devices

Single wafer tool with auto loading from a cassette. Pieces need a pocket carrier wafer for transport. Chuck temperature controls wafer heating.

non contact 3D optical profiling

4" wafers; can be adopted to do 6" or 8" wafers; pieces need to be bonded to carrier wafers

Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists

Spray coating of resists