Resist Prebake

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Resist Prebake	Oven 90°C prebake oven90	The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.	All	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Process Temperature Range	Notes
Resist Prebake	Oven 90°C prebake oven90	All	Pieces 2" 3" 4" 6"	90 ºC	Bakes wafers after resist coating.