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Resist Prebake

Technique Tabs

Main Tab
Processing Techniques Equipment name & NEMO ID Teaser Blurb Cleanliness Location
Resist Prebake Oven 90°C prebake
oven90

The 90°C Oven is the 90°C prebake oven. It is used to bake wafers after resist coating.

 All SNF Paul G Allen L107 Cleanroom
Detail Tab
Processing Technique Equipment name & NEMO ID Cleanliness Substrate Size Process Temperature Range Notes
Resist Prebake Oven 90°C prebake
oven90 		All
90 ºC

Bakes wafers after resist coating.
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