Wet Bench Clean_res-hf wbclean_res-hf |
Wet Bench Clean Piranha/HF/Phosphoric Training |
Clean |
SNF Cleanroom Paul G Allen L107 |
Resist as mask allowed
|
Laurell Manual Resist Spinner laurell-R |
Laurell Manual Resist Spinner Training |
All |
SNF Cleanroom Paul G Allen L107 |
SU-8, LOL, Ebeam resists allowed. No Acetone allowed.
|
Tencor P2 Profilometer p2 |
Tencor P2 Profilometer Training |
Clean, Semiclean |
SNF Cleanroom Paul G Allen L107 |
Step height measurement range 500 Å to 80 µm
|
Lesker2 Sputter lesker2-sputter |
Sputter Lesker 1&2 Training |
Semiclean |
SNF Cleanroom Paul G Allen L107 |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter
|
Wet Bench Flexcorr 4 wbflexcorr-4 |
Wet Bench Flexcorr 1and2 and 3and4 Training |
Flexible |
SNF Cleanroom Paul G Allen L107 |
Manual wet etching of non-standard materials using acids or bases. Hot plate, HF bath, and controlled temperature bath available. GaAs not allowed.
|
EVG 101 Spray Coater evgspraycoat |
Spray Coater EVG 101 Training |
All |
SNF Cleanroom Paul G Allen L107 |
Spray coating of resists
|
AJA2 Evaporator aja2-evap |
Evaporator AJA2 |
Semiclean |
SNF Cleanroom Paul G Allen L107 |
For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance
|
Sinton Lifetime Tester sinton-lifetime-tester |
Sinton Lifetime Tester Training |
Flexible |
SNF Exfab Paul G Allen 151 Ocean |
|
LEI1500 Contactless Sheet Resistance Mapping eddycurrent |
LEI1500 Contactless Sheet Resistance Mapping Training |
All |
SNF Exfab Paul G Allen 151 Ocean |
|
DISCO Wafer Saw DISCO wafersaw |
Wafersaw DISCO training |
Flexible |
SNF Exfab Paul G Allen 159 Capitola |
|
Lesker Sputter lesker-sputter |
Sputter Lesker 1&2 Training |
Flexible |
SNF Exfab Paul G Allen 155A Venice |
reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter
|
Optomec Printer optomec-printer |
Optomec Printer Training |
Flexible |
SNF Exfab Paul G Allen 155A Venice |
|
AJA Evaporator aja-evap |
Evaporator AJA training |
Flexible |
SNF Exfab Paul G Allen 155A Venice |
For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance
|
PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater |
Parylene Coater Training |
Flexible |
SNF Exfab Paul G Allen 155 Mavericks |
|
Plasmaetch PE-50 plasma-etch |
Plasmaetch PE-50 Training |
Flexible |
SNF Exfab Paul G Allen 155 Mavericks |
Low power, high pressure plasma; low bias, minimal damage. Often used for surface treatment At SNF - nSiL lab
|