Titanium (Ti) etchant Peroxide-based

Preferred Short Name:

Ti-Etch

Chemical Formula:

H₂O₂

Equipment name & Badger ID	Training Required & Charges	Cleanliness	Location	Chemicals	Notes
Wet Bench CMOS Metal wbclean3	Wet Bench CMOS Metal (wbclean3) Training	Semiclean	SNF Cleanroom Paul G Allen L107	20:1 BOE 50:1 HF 6:1 BOE Al-Etch Ti-Etch W-etch	Al, Ti, or W wet etching or oxide etching