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Plasmaetch PE-50 (plasma-etch)

Overview

The Plasmaetch PE-50 is located in Venice, and is used primarily for surface treatment, for example with PDMS.  If you have questions about your process or would like to get trained, please contact primary trainer.

Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Maximum Load: 
Multiple
Notes: 

Low power, high pressure plasma; low bias, minimal damage. Often used for surface treatment At SNF - nSiL lab

Lab Organization, Location, and NEMO Information

Lab Organization: 
(SNF Exfab)
Location: 
SNF Exfab Paul G Allen 155 Mavericks
NEMO Area: 
nSiL: 155A Venice
NEMO ID: 
plasma-etch

Training and Maintenance

Lab Facility: 
SNF Exfab
Training Charges: 
0.50 hours
Primary Trainer: 
Lavendra Mandyam
Backup Trainer(s): 
Carsen Kline
Primary Maintenance: 
Graham Ewing

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Contact the primary trainer: Lavendra Mandyam