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Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
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Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
Mavericks (ExFab Room 155) Policies
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All Litho class
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"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
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NEMO User Guide
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Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
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Equipment Name Table
Characterization
CVD
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Equipment Used
Plasmaetch PE-50 (plasma-etch)
SNF ExFab PE-50 Training Video
SNF ExFab PE-50 Training Video
