ExFab: 155A Venice | Stanford Nanofabrication Facility

Following is a list of tools located in this lab space (room).

Equipment Tables

Equipment name & NEMO ID	Training Required & Charges	Cleanliness	Location	Notes
AJA Evaporator aja-evap	Evaporator AJA training	Flexible	SNF Exfab Paul G Allen 155A Venice	For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance
Epilog Fusion M2 Laser Cutter lasercutter	Lasercutter Epilog Fusion M2 Training	Flexible	SNF Exfab Paul G Allen 155A Venice
Lesker Sputter lesker-sputter	Sputter Lesker 1&2 Training	Flexible	SNF Exfab Paul G Allen 155A Venice	reactive O2/N2 sputtering, substrate bias, substrate heating, co-sputter
Minitech-GX Micromill micromill	Micromill Training	Flexible	SNF Exfab Paul G Allen 155A Venice
Optomec Printer optomec-printer		Flexible	SNF Exfab Paul G Allen 155A Venice
Oriel Deep UV Exposure Lamp oriel-duv	Oriel DUV Training	Flexible	SNF Exfab Paul G Allen 155A Venice
Plasmaetch PE-50 plasma-etch	Plasmaetch PE-50 Training	Flexible	SNF Exfab Paul G Allen 155A Venice	Low power, high pressure plasma; low bias, minimal damage. Often used for surface treatment.

Cleanliness

Location

Notes

AJA Evaporator
aja-evap

Flexible

For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance

Epilog Fusion M2 Laser Cutter
lasercutter