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Copper

Chemical Formula:

Cu

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
AJA Evaporator aja-evap	Flexible	SNF Exfab Paul G Allen 155A Venice	0.00 - 300.00 nm	Ag Al Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti TiO₂
AJA2 Evaporator aja2-evap	Flexible	SNF Cleanroom Paul G Allen L107	0.00 - 300.00 nm	Ag Al Au Cr Cu Ni Pd Pt Ti
CHA Solutions II Evaporator cha-evap	Flexible	SNF Cleanroom Paul G Allen L107	0.00 - 300.00 nm	Ag Al Au Cr Cu Ni Pd Pt Ti
KJL Evaporator 1		SNSF NPC Cleanroom Spilker suite006	200.00 nm	Al Au Cr Cu Ge Ni Pd Pt Ti V
Lesker Sputter lesker-sputter	Flexible	SNF Exfab Paul G Allen 155A Venice		Ag Al Al₂O₃ AlSi Au Co Cr Cu Fe In_xSn_yO_z Nb Ni Pd Si SiO₂ Ta Ti TiN W