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Stanford Nanofabrication Facility
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Aluminum Indium Phosphide
Chemical Formula:
AlInP
Equipment Tabs
Etching Equipment
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
Oxford III-V etcher
Ox-35
Flexible
SNF Cleanroom Paul G Allen L107
GaAs
AlGaN
AlInP
GaN
InGaP
InSb
Projects
Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher- Final Report
-- (Report)
Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher- Final Presentation
-- (Presentation)
Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher
