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Function and Method(s):
Dry Etching
Equipment Used:
Oxford III-V etcher (Ox-35)
Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher- Final Report
Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher- Final Report
PDF File:
Developing Etching Process for Nanostructures on InGaP and AlInP Using OX-35 Etcher- Final Report
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Materials
Indium Gallium Phosphide (InGaP)
Aluminum Indium Phosphide (AlInP)
Thursday, August 10, 2023
