ASML PAS 5500/60 i-line Stepper
asml |
Stepper ASML PAS 5500/60 i-line Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
5:1 reducing stepper |
EVG 101 Spray Coater
evgspraycoat |
Spray Coater EVG 101 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Spray coating of resists |
Headway Manual Resist Spinner
headway2 |
Resist Coat (manual) Headway Manual Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists |
HMDS Vapor Prime Oven, YES
yes |
YES Prime Oven Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Two programs: Singe and HMDS prime or Singe only. No Resist allowed! |
Karl Suss MA-6 Contact Aligner
karlsuss2 |
Contact Aligner Karl Suss MA-6 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner.
Backside align. |
Karl Suss MA-6 Contact Aligner
karlsuss |
Contact Aligner Karl Suss MA-6 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner.
Backside align, including IR. |
Laurell Manual Resist Spinner
laurell-R |
Laurell Manual Resist Spinner Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
SU-8, LOL, Ebeam resists allowed. No Acetone allowed. |
Oven (White)
white-oven |
White Oven Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
For LOL2000 bake or bakes which are not allowed in the other ovens and need higher temperatures, up to 200C, programmable. |
Oven 110°C post-bake
oven110 |
Resist Postbake Oven 110°C Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Bakes wafers with resist after the development, called post-bake. |
Oven 90°C prebake
oven90 |
Resist Prebake Oven 90°C Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Bakes wafers after resist coating. |
Oven BlueM 200°C to 430°C
bluem |
Blue M Oven Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
Convection in N2. Cure. Programmable. |
SVG Develop Track 1
svgdev |
SVG Resist Develop tracks 1 and 2 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Automatic development. |
SVG Develop Track 2
svgdev2 |
SVG Resist Develop tracks 1 and 2 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Automatic development. |
SVG Resist Coat Track 1
svgcoat |
SVG Resist Coat Tracks 1 and 2 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Automatic Resist spinning and bake |
SVG Resist Coat Track 2
svgcoat2 |
SVG Resist Coat Tracks 1 and 2 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Automatic HMDS, Resist spinning, and Bake. AZ5214IR Image Reversal. |
Ultraviolet Photoresist Cure
uvcure |
Ultraviolet Photoresist Cure Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
|
Wet Bench Solvent Lithography
lithosolv |
Lithography Solvent Bench Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
Manual solvent cleaning of substrates or masks. Teflon coated metal tweezers cleaning. |
