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Parylene
Chemical Formula:
poly(p-xylylene)
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
PDS 2010 LABCOTER™ 2 Parylene Deposition System
parcoater
Flexible
SNF Exfab Paul G Allen 155 Mavericks
poly(p-xylylene)
Etching Equipment
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
AMAT P5000 Etcher
p5000etch
Clean
Clean (Ge)
Semiclean
SNF Cleanroom Paul G Allen L107
Si
Si3N4
SiGe
SiO
2
SiON
C
C
C
dimethylpolysiloxane
poly(p-xylylene)
SiC
Ti
Various C-based
W
WSi
2
PI
Resist
Ti Tungsten
Technics Asher
technics
Flexible
SNF Cleanroom Paul G Allen L107
Resist
dimethylpolysiloxane
poly(p-xylylene)
PI
Projects
Grayscale Lithography and Resist Reflow for Parylene Patterning- Final Report
-- (Report)
Grayscale Lithography and Resist Reflow for Parylene Patterning- Final Presentation
-- (Presentation)