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Zirconium Dioxide

Preferred Short Name: 
Zirconia
Chemical Formula: 
ZrO2

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
Fiji 1 ALD
fiji1
SNF Cleanroom Paul G Allen L107
1.00 Å - 50.00 nm
Fiji 2 ALD
fiji2
SNF Cleanroom Paul G Allen L107
1.00 Å - 50.00 nm
Savannah ALD
savannah
SNF Cleanroom Paul G Allen L107
1.00 Å - 50.00 nm
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