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Molybdenum Oxide
Preferred Short Name:
Moly Oxide
Chemical Formula:
MoO
3
Equipment Tabs
Deposition Equipment
(active tab)
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Fiji 2 ALD
fiji2
Flexible
SNF Paul G Allen L107 Cleanroom
1.00 Å
-
50.00 nm
Metal oxides
Al
2
O
3
Ga
2
O
3
HfN
HfO
2
In
2
O
3
In
x
Sn
y
O
z
MoO
3
Ni
x
O
y
Pt
Ru
Si3N4
SiO
2
SnO
2
SrO
Ta
2
O
5
TiN
TiO
2
Various Dielectrics
ZrO
2
