Skip to content Skip to navigation

Fiji 1 ALD (fiji1)

Overview

photo of Fiji1 in SNF Cleanroom

Fiji1 is a load-locked, plasma-enabled atomic layer deposition (ALD) system. Coupled with Fiji2, Fiji1 is a Fiji F202 system from Cambridge Nanotech and is used for plasma assisted ALD of various dielectric and metallic films. The system can accommodate pieces up to an 8" wafer. Fiji1 is currently classified as CMOS restricted.

Cleanliness: 
Semiclean

Processing Technique(s)

Capabilities and Specifications

Material Thickness Range: 1.0 Å - 50.0 nm
Process Temperature Range: 
24 °C - 350 °C

Lab Organization, Location, and NEMO Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
NEMO Area: 
SNF: Chemical Vapor Deposition
NEMO ID: 
fiji1

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
2.00 hours
Primary Trainer: 
Alex Denton
Backup Trainer(s): 
Graham Ewing
Primary Maintenance: 
Mike Dickey
Backup Maintenance: 
Jim Haydon

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Written Quiz. After shadowing a user, contact the primary trainer to take the short written quiz for the Fiji1/2. The quiz is closed book and all the information should be known to a someone who has studied the online documentation and has gone through a shadowing.
  4. Oral Qualification Exam. After the written quiz has been passed, you may schedule a final oral qualification exam with the primary trainer or a superuser.  At this exam you are expected to demonstrate your ability to run the tool safely and appropriately without any input.  Once this final stage is satisfactorily passed, you will be given full access and utilization for the Fiji1 and Fiji2 as an operator.