Angled Etching of Silicon in AMT Etcher with Aluminum Mesh
PROM Request Title:
Angled Etching of Silicon in AMT Etcher with Aluminum Mesh
PROM Request Summary:
Request to use Aluminum mesh in AMT etcher to develop angled etch recipe.
PROM Date:
11/17/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
