The SNF and ExFab facilities provide characterization equipment that is used for fabrication process development and analysis as well as some electrical device characterization.
Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Ã
500Å to 300µm
3 Probe Heads for different cleanliness groups.
non contact 3D optical profiling
Step height measurement range 500 Å to 80 µm