Characterization is a broad term that is used to describe any method of analysis of properties of materials and devices. The various tools listed here will use different techniques to study a wide variety of properties.

Processing Technique Equipment name & NEMO ID Cleanliness Material Thickness Range Substrate Size Maximum Load (number of wafers) Process Temperature Range Notes Stylus Tip Radius
Atomic Force Microscopy (AFM) Asylum AFM
afm-asylum 		Flexible
Potentiostat Measurement Biologic SP-300
biologic 		Flexible
Characterization CytoViva HSI
cytoviva 		Flexible
Step Profile Dektak XT-S Stylus Profiler SNSF NPC 1 12.5 µm
Film Stress Measurement Flexus 2320 Stress Tester
stresstest 		"All"
1
Characterization Jasco UV-Vis-NIR
jasco-uv-vis-nir 		Flexible
Microscopy Keyence Digital Microscope VHX-6000
keyence 		"All"
Sheet Resistance Measurement, Hall measurement Lakeshore Hall Measurement System
LakeshoreHall 		"All"
100.00 μm - 1000.00 μm
1 piece
-258 °C - 1000 °C
Sheet Resistance Measurement LEI1500 Contactless Sheet Resistance Mapping
eddycurrent 		"All"
1 wafer(2" to 8")
Dynamic Light Scattering Malvern Dynamic Light Scattering (DLS) Zetasizer
malvern-dls 		Flexible
Atomic Force Microscopy (AFM) Nanocue AFM
AFM NanoCue 		Flexible
Reflectometry Nanospec 210XP
nanospec2 		"All"

Manual Film Thickness Measurement. Single or dual layer transparent films > 300 Å
Reflectometry Nanospec 3
nanospec3 		"All"
Step Profile Profilometer Alphastep 500
alphastep 		Flexible
1

500Å to 300µm

5 µm
Step Profile Profilometer AlphaStep D-300
alphastep2 		Flexible
1 2 µm
Sheet Resistance Measurement Prometrix Resistivity Mapping System
prometrix 		"All"
1

3 Probe Heads for different cleanliness groups.
Reflectometry Reflectance Spectrometer Filmetrics F40
filmetrics 		"All" one piece or wafer
Scanning Electron Microscopy (SEM) SEM -Zeiss Merlin
sem-merlin 		"All"
0.00 mm - 35.00 mm
one
Optical Profilometer, Interferometry Sensofar S-neox
s-neox 		"All"
1

non contact 3D optical profiling
Minority Carrier Characterization Sinton Lifetime Tester
sinton-lifetime-tester 		Flexible

Pages