Aixtron MOCVD - III-V system
aix200 |
MOCVD - III-V Aixtron training |
Flexible |
SNF MOCVD Paul G Allen 213XA |
N and P doping available.
For Si clean: SC1, SC2, HF dip.
For III-V clean: HCl or HF dip. |
AJA Evaporator
aja-evap |
Evaporator AJA training |
Flexible |
SNF Exfab Paul G Allen 155A Venice |
For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance |
AJA2 Evaporator
aja2-evap |
Evaporator AJA2 Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
For more than 300nm deposition, please contact Gabe Catalano <gcatalano@stanford.edu> in advance |
ASML PAS 5500/60 i-line Stepper
asml |
Stepper ASML PAS 5500/60 i-line Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
5:1 reducing stepper |
CHA Solutions II Evaporator
cha-evap |
Evaporator CHA Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
For more than 300nm deposition, please contact Neel Mehta <nmehta26@stanford.edu> in advance |
Critical Point Dryer Tousimis Automegasamdri-936
cpd |
Critical Point Dryer Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
CO2 drying after release of micromachined devices |
DISCO Wafer Saw
DISCO wafersaw |
Wafersaw DISCO training |
Flexible |
SNF Exfab Paul G Allen 159 Capitola |
|
EVG 101 Spray Coater
evgspraycoat |
Spray Coater EVG 101 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Spray coating of resists |
Fiji 1 ALD
fiji1 |
ALD Fiji 1 and 2 Training |
Semiclean |
SNF Paul G Allen L107 Cleanroom |
|
Fiji 2 ALD
fiji2 |
ALD Fiji 1 and 2 Training |
Flexible |
SNF Paul G Allen L107 Cleanroom |
|
Finetech Lambda
flipchipbonder |
Flip Chip Bonder Training |
Flexible |
SNF Exfab Paul G Allen 104 Stinson |
|
First Nano carbon nanotube CVD furnace
cvd-nanotube |
cvd-nanotube training |
Flexible |
SNF Exfab Paul G Allen L119 Año Nuevo |
Aligned single-walled carbon nanotube growth with ST-cut quartz substrates (available from SNF stockroom);1-15 single-walled carbon nanotubes per micron density |
Flexus 2320 Stress Tester
stresstest |
Stress Tester Flexus 2320 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
|
Headway Manual Resist Spinner
headway2 |
Resist Coat (manual) Headway Manual Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists |
Heidelberg MLA 150
heidelberg |
Heidelberg Training |
"All" |
SNF Exfab Paul G Allen 104 Stinson |
Direct Write |
Heidelberg MLA 150 - 2
heidelberg2 |
Heidelberg Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Direct Write |
HMDS Vapor Prime Oven, YES
yes |
YES Prime Oven Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Two programs: Singe and HMDS prime or Singe only. No Resist allowed! |
Intlvac Evaporator
Intlvac_evap |
Evaporator Intlvac Training |
Clean, Semiclean |
SNF Paul G Allen L107 Cleanroom |
|
Karl Suss MA-6 Contact Aligner
karlsuss |
Contact Aligner Karl Suss MA-6 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner.
Backside align, including IR. |
Karl Suss MA-6 Contact Aligner
karlsuss2 |
Contact Aligner Karl Suss MA-6 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner.
Backside align. |
