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Gases List

These are the gases provided for lab users. If you would like to use other gases, please consult the PROM Committee.

10% Hydrogen in Nitrogen (10% H₂ in N₂)

2% Silane in Nitrogen (2% SiH₄ in N₂)

4% Forming gas (4% H₂ in N₂)

5% Silane in He (5% SiH₄ in He)

Air (78% N₂, 21% O₂, ~1% Ar)

Ammonia (NH₃)

Argon (Ar)

Arsine (AsH₃)

B3H6 (B₃H₆)

Boron trichloride (BCl₃)

Chlorine (Cl₂)

Chlorodifluoromethane (CHClF₂)

Diborane (B₂H₆)

DCS (H₂SiCl₂)

Ethanol vapor (C₂H₅OH)

Fluoroform (CHF₃)

Germane (GeH₄)

He/O2 (80% He/ 20%O₂)

Helium (He)

HF vapor (HF vapor)

Hydrogen (H₂)

Hydrogen Bromide (HBr)

Methane (CH₄)

MO sources (MO sources)

NF3 (NF₃)

Nitrogen (N₂)

Nitrous (N₂O)

Oxygen (O₂)

Perfluorocyclobutane (C₄F₈)

Perfluoroethane (C₂F₆)

Phosphine (PH₃)

Silane (SiH₄)

Silicon Germanium (SiGe)

Sulfur Hexafluoride (SF₆)

Tetraethyl Orthosilicate (Si(OC₂H₅)₄)

Tetrafluoromethane (CF₄)

Xenon Difluoride (XeF₂)

Last modified: 1 Feb 2023