Short Name:
8"
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Other Materials Etched | Gases | Substrate Size | Substrate Type | Maximum Load |
|---|---|---|---|---|---|---|---|---|
|
Technics Asher technics |
Flexible | Four 4" wafers to pieces, one 6" or 8" wafer | ||||||
|
Woollam woollam |
"All" | 1 |