Chemical Formula:
SiGe
Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Gases | Substrate Size | Substrate Type | Maximum Load |
|---|---|---|---|---|---|---|---|
|
Xactix Xenon Difluoride Etcher xactix |
"All" | 1 |