Compound materials with chemical elements from the III and V groups of the periodic table.
Equipment name & NEMO ID | Technique | Cleanliness | Primary Materials Etched | Other Materials Etched | Material Thickness Range | Materials Lab Supplied | Resist | Developer | Process Temperature Range | Gases | Sample Size Limits | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Oven (White) white-oven |
Flexible |
0 °C - 200 °C
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Oven 110°C post-bake oven110 |
All |
110 ºC
|
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Oven 90°C prebake oven90 |
All |
90 ºC
|
, , , , , , , , |
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Oven BlueM 200°C to 430°C bluem |
Flexible |
0 °C - 430 °C
|
, , , , , , , , , |
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PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater |
Flexible |
, , , , , , , , , , , , |
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Profilometer Alphastep 500 alphastep |
Flexible |
, , , , , , , , |
1 | |||||||||||
Profilometer AlphaStep D-300 alphastep2 |
Flexible |
, , , , , , , , , , , , |
1 | |||||||||||
Prometrix Resistivity Mapping System prometrix |
All |
, , , , , , , , |
1 | |||||||||||
Samco PC300 Plasma Etch System samco |
Flexible |
20 ºC
|
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Four 4" wafers or two 6" wafers and one 8" wafer | ||||||||||
Savannah ALD savannah |
Flexible |
1.00 Å -
50.00 nm
|
24 °C - 250 °C
|
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SEM -Zeiss Merlin sem-merlin |
All |
0.00 mm -
35.00 mm
|
6 in wafer |
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Sensofar S-neox s-neox |
All |
, , , , , , , , |
1 | |||||||||||
SPTS uetch vapor etch uetch |
All |
, , , , , , , , , |
1 | |||||||||||
SVG Develop Track 1 svgdev |
All |
, , , , , , , , |
25 4 inch wafers | |||||||||||
SVG Develop Track 2 svgdev2 |
All |
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25 4 inch wafers | |||||||||||
SVG Resist Coat Track 1 svgcoat |
All |
, , , , , , , , |
25 4 inch wafers | |||||||||||
SVG Resist Coat Track 2 svgcoat2 |
All |
, , , , , , , , |
25 4 inch wafers | |||||||||||
Tencor P2 Profilometer p2 |
Clean, Semiclean |
, , , , , , , , |
1 | |||||||||||
Tystar Bank 1 Tube 3 Poly B1T3 Flexible Poly |
Flexible |
25.00 Å -
2.00 μm
|
420 °C - 630 °C
|
, , , , , |
100 | |||||||||
Tystar Bank 1 Tube 4 LTO B1T4 Flexible LTO |
Flexible |
25.00 Å -
2.00 μm
|
300 °C - 500 °C
|
, , , , , |
100 |