Chlorodifluoromethane

Chemical Formula:

CHClF₂

Gases Equipment Tabs

Etch Equipment Table

Etch Equipment
Equipment name & Badger ID	Cleanliness	Location	Primary Materials Etched	Other Materials Etched	Gases
MRC Reactive Ion Etcher mrc	Flexible	SNF Cleanroom Paul G Allen L107	Metals Various Dielectrics	Metal oxides PI	Ar CHClF₂ CHF₃ O₂ SF₆

Anneal/Oxidation Equipment Table

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