Heidelberg MLA 150 - 2
heidelberg2 |
Heidelberg Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Direct Write |
Heidelberg3
heidelberg3 |
Heidelberg Training |
"All" |
SNF Exfab Paul G Allen L104 Stinson |
|
HMDS Vapor Prime Oven, YES
yes |
YES Prime Oven Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
Two programs: Singe and HMDS prime or Singe only. No Resist allowed! |
Intlvac Evaporator
Intlvac_evap |
Evaporator Intlvac Training |
Clean, Semiclean |
SNF Paul G Allen L107 Cleanroom |
|
Karl Suss MA-6 Contact Aligner
karlsuss |
Contact Aligner Karl Suss MA-6 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner.
Backside align, including IR. |
Karl Suss MA-6 Contact Aligner
karlsuss2 |
Contact Aligner Karl Suss MA-6 Training |
"All" |
SNF Paul G Allen L107 Cleanroom |
1:1 Contact Aligner.
Backside align. |
Keyence Digital Microscope VHX-6000
keyence |
Microscope Keyence Training |
"All" |
SNF Exfab Paul G Allen L104 Stinson |
|
Lakeshore Hall Measurement System
LakeshoreHall |
Lakeshore Hall Measurement System training |
"All" |
SNF Exfab Paul G Allen 151 Ocean |
|
Lam Research TCP 9400 Poly Etcher
lampoly |
Lam Research TCP 9400 Poly Etcher Training |
Clean, Semiclean |
SNF Paul G Allen L107 Cleanroom |
Single wafer etch with auto-loading from a cassette. Equipment originally used for gate etching with high selectivity to thin gate oxides. |
LEI1500 Contactless Sheet Resistance Mapping
eddycurrent |
LEI1500 Contactless Sheet Resistance Mapping Training |
"All" |
SNF Exfab Paul G Allen 151 Ocean |
|
