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Stanford Nanofabrication Facility
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Fab Project Courses: E241 & EE412
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Device Process Courses: EE410 and EE312
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Overview
SNF Lab Manual, link to google doc
SNF Lab Manual
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Gowning lab specific
Garment checkout for Cleanroom L107
Gowning Procedure for Cleanroom L107
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Prescription Safety Glasses
Training
Overview/Equipment List
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All Litho class
Materials
Overview
Chemicals & Materials
Cleanliness Groups
"All" List of Tools
"Clean" List of Tools
"Clean-Ge" List of Tools
"Clean (MOCVD)" List of Tools
"Semiclean" List of Tools
"Flexible" List of Tools
New Process or Material Requests (PROM)
ProM Committee
ProM Approach
TMAH Protocols
TMAH Checklist
PROM (PRocess and Materials) Form
PROM archive view
Chemicals List
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Gases List
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Run NEMO (login required)
NEMO User Guide
External Links
Wafer Dopant and Resistivity Specs
Face shield cleaning using steamer
Tool Monitoring
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For Emergencies
Staff List
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Equipment
Equipment Name Table
Characterization
CVD
Doping
Dry Etch
Metallization
Oxidation and Annealing
Photolithography
Wet Chemical Processing
ExFab: 151 Ocean
Following is a list of tools located in this lab space (room).
Equipment Tables
Summary
Specifications
Items per page
5
10
20
40
50
60
- All -
Equipment name & NEMO ID
Training Required & Charges
Cleanliness
Location
Notes
Alveole Primo
alveole
Protein patterning Alveole Primo Training
Flexible
SNF Exfab Paul G Allen 151 Ocean
Asylum AFM
afm-asylum
AFM Asylum Training
Flexible
SNF Exfab Paul G Allen 151 Ocean
CytoViva HSI
cytoviva
Cytoviva Training
Flexible
SNF Exfab Paul G Allen 151 Ocean
Fumehood 2
fumehood2
Fumehood 2 Training
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Jasco UV-Vis-NIR
jasco-uv-vis-nir
Jasco UV-Vis-NIR Training
Flexible
SNF Exfab Paul G Allen 151 Ocean
Lakeshore Hall Measurement System
LakeshoreHall
Lakeshore Hall Measurement System training
"All"
SNF Exfab Paul G Allen 151 Ocean
LEI1500 Contactless Sheet Resistance Mapping
eddycurrent
LEI1500 Contactless Sheet Resistance Mapping Training
"All"
SNF Exfab Paul G Allen 151 Ocean
Micromanipulator6000 IV-CV probe station
micromanipulator6000
micromanipulator6000 IV-CV probe station Training
"All"
SNF Exfab Paul G Allen 151 Ocean
Probe Station P200L
Probe Station P200L
Probe Station P200L Training
"All"
SNF Exfab Paul G Allen 151 Ocean
Sinton Lifetime Tester
sinton-lifetime-tester
Sinton Lifetime Tester Training
Flexible
SNF Exfab Paul G Allen 151 Ocean
Solidscape Wax 3D Printer
3d-wax-printer
Solidscape 3D Wax Printer Training
Flexible
SNF Exfab Paul G Allen 151 Ocean
Voltera
voltera
Voltera Training
Flexible
SNF Exfab Paul G Allen 151 Ocean