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RTA AllWin 610 (aw610_r)

Overview

SNF-Allwin 610 Rapid Thermal Process Systems
Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
21 °C - 1150 °C

Lab Organization, Location, and NEMO Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
NEMO Area: 
SNF: Annealing, Oxidation and Doping
NEMO ID: 
aw610_r

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.00 hours
Primary Trainer: 
Alex Denton
Primary Maintenance: 
Jim Haydon
Backup Maintenance: 
Mike Dickey

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Contact the primary trainer: Alex Denton