Annealing of 1 cm2 GaAs Chip at 350 C in RTA
PROM Request Title:
Annealing of 1 cm2 GaAs Chip at 350 C in RTA
PROM Request Summary:
Calculations performed to quanitfy exposure risk to As gas.
PROM Date:
10/12/2017
PROM Decision:
Request approved.
Link to PROM Request and supporting documentation:
Equipment List:
