Encapsulated 1cm2 GaAs Substrate Annealing in RTA
PROM Request Title:
Encapsulated 1cm2 GaAs Substrate Annealing in RTA
PROM Request Summary:
Encapsulated 1cm2 GaAs substrate annealing in RTA. GaAs substrates are not allowed in RTA without approval.
PROM Date:
02/26/2014
PROM Decision:
Approved. Any changes to documented request will require re-evaluation by committee.
Link to PROM Request and supporting documentation:
Equipment List:
