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Nitrogen trifluoride
Chemical Formula:
NF
3
Gases Equipment Tabs
Etch Equipment Table
Equipment name or Badger ID
Partial words okay.
Etch Equipment
Equipment name & Badger ID
Cleanliness
Location
Primary Materials Etched
Other Materials Etched
Gases
Oxford Plasma Pro ICP-RIE Ox
Ox-Ox
Clean
SNF Paul G Allen L107 Cleanroom
Si
Si3N4
SiO
2
Poly Silicon
Ar
C
4
F
8
CF
4
CHF
3
N
2
NF
3
O
2
SF
6
Anneal/Oxidation Equipment Table
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
