Vapor Etchers
This is a summary of the vapor etchers.
If you would like to see a summary of etchers for a specific material (i.e. SiO2 or poly silicon) please visit the materials page.
Dry Etch Equipment Summary
| Equipment Name | Processing Technique | Cleanliness | Primary Materials Etched | Other Materials Etched | Gases | Substrate Size | Maximum Load | Notes |
|---|---|---|---|---|---|---|---|---|
| Xactix Xenon Difluoride Etcher (xactix) | Vapor Etching | All |
|
1 |
Isotropic Si etching; can be used for backside Si removal on small pieces |
|||
| SPTS uetch vapor etch (uetch) | Vapor Etching | All |
|
1 |
Pieces need a carrier wafer; Isotropic Etching |
Last modified: 30 Apr 2020
