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20:1 Buffered oxide etch

Preferred Short Name: 
20:1 BOE
Chemical Formula: 
38% NH4F, 2% HF, 60% H2O
Full Chemical Name (for In-Use Hazardous Chemicals card): 
38% ammonium fluoride, 2% hydrofluoric acid, 60% water

BOE (Buffered Oxide Etch) is an HF based etchant, typically used to etch oxides. The buffer helps to reduce the impact to resist during etching.

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