ExFab: 159 Capitola

Following is a list of tools located in this lab space (room).

Equipment Tables

Equipment name & NEMO ID	Technique	Cleanliness	Substrate Size	Substrate Type	Maximum Load
CMP GnP POLI-400L cmp	Machining > Wafer Polishing	Flexible
DISCO Backgrinder disco-backgrind	Machining	Flexible
DISCO Wafer Saw DISCO wafersaw	Machining > Wafer Saw	Flexible	Pieces 2" 3" 4" 6" 8"	Silicon (Si) Quartz (SiO2) Sapphire (Al₂O₃) Glass (SiO₂) Germanium (Ge) Silicon Carbide (SiC) Gallium Nitride (GaN) III-V (III-V)	1x4", 1x6" or 1x8" wafer, or pieces