Chemical Formula:
XeF2
| Equipment name & NEMO ID | Cleanliness | Location | Primary Materials Etched | Other Materials Etched | Gases |
|---|---|---|---|---|---|
|
Xactix Xenon Difluoride Etcher xactix |
SNF Paul G Allen L107 Cleanroom |
|
No equipment matches all of the filter criteria you have set above.