Step Profile

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Step Profile	Dektak XT-S Stylus Profiler SNSF NPC	Surface profiler measures step heights as small as 10nm. Stylus tip radius is 12.5 microns.		SNSF NPC Spilker suite 6
Step Profile	Profilometer Alphastep 500 alphastep	Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group. Scan length from 100 Angstroms up to 0.3 mm. Stylus tip radius is 5 µm.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Step Profile	Profilometer AlphaStep D-300 alphastep2	A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.	Flexible	SNF Exfab Paul G Allen 104 Stinson

Processing Techniques

Equipment name & NEMO ID

Teaser Blurb

Cleanliness

Location

Step Profile

Dektak XT-S Stylus Profiler SNSF NPC

Surface profiler measures step heights as small as 10nm. Stylus tip radius is 12.5 microns.

SNSF NPC Spilker suite 6

Step Profile

Profilometer Alphastep 500
alphastep

Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group. Scan length from 100 Angstroms up to 0.3 mm. Stylus tip radius is 5 µm.

Flexible

SNF Exfab Paul G Allen 104 Stinson

Step Profile

Profilometer AlphaStep D-300
alphastep2

A stylus-based (tip radius 2 microns) surface profiler that measures step heights from 50nm to 300 µm on materials.

Flexible

SNF Exfab Paul G Allen 104 Stinson

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes	Stylus Tip Radius
Step Profile	Dektak XT-S Stylus Profiler SNSF NPC			1		12.5 µm
Step Profile	Profilometer Alphastep 500 alphastep	Flexible	Pieces 2" 3" 4" 6"	1	500Å to 300µm	5 µm
Step Profile	Profilometer AlphaStep D-300 alphastep2	Flexible	Pieces 2" 3" 4" 6"	1		2 µm