Overview
This is a 200mm semiautomatic wafer prober with NETPROBE-7 control software. The software provides an included wafer map, alignment, sub-die sites and pattern recognition. The probe station is connected to B1500A with 4 SMUs and 4 probe positioners/manipulators. The supported temperature range is from 0C to 300C. With a Keysight B1500A Semiconductor Device Analyzer, it is capable of both I-V (Current-Voltage) and C-V (Capacitance-Voltage) measurements.
- Easy and fast yet accurate IV and CV measurements by automated connection change by the SCUU: SMU3 and SMU4 are switched between IV and CV measurement modes automatically by SCUU, while SMU1 and SMU2 can be used for IV measurement only
- IV measurement resolution 30 pA with SMU3 and SMU4 (100 pA with SMU1 and SMU2), CV measurement resolution 0.3 pF
- 100 V DC bias due to the addition of SCUU; Up to 250 mVrms signal level; CV measurement in multi frequency from 1 kHz to 5 MHz with minimum 1 mHz frequency resolution
Processing Technique(s)
Capabilities and Specifications
Substrate Type
Substrate Sizes
Lab Organization, Location, and NEMO Information
Training and Maintenance
Steps to become a tool user
Become a member of nano@stanford.
Become a member of SNF.
Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or SNF usage to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
You need to have used the Micromanipulator6000 for a few months and demonstrate a safe use of Micromanipulator6000 before getting trained on this tool.
- Contact the primary trainer: Swaroop Kommera