Manual development of resist in beakers. SNF approved developers only. No solvents!
Restricted to non-conductive films only
3 probe heads for different cleanliness groups.
Aligned single-walled carbon nanotube growth with ST-cut quartz substrates (available from SNF stockroom);1-15 single-walled carbon nanotubes per micron density
Adjustable spin speeds, spin time. SNF-acceptable resists or polymers. Ebeam resists
