Nitrous Oxide (N2O)

Nitrous
Chemical Formula: 
N2O
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Deposition Equipment
Equipment name & NEMO ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
Oxford Plasma Pro PECVD
Ox-PECVD
SNF Paul G Allen L107 Cleanroom
100.00 Å - 4.00 μm
PlasmaTherm Shuttlelock PECVD System
ccp-dep
SNF Paul G Allen L107 Cleanroom
100.00 Å - 4.00 μm