Furnaces annealing is a heated process performed in an Annealing Furnace to can change material properties of a sample. Anneal parameters include temperature, ramp time, anneal time, ambient gas. Generally anneal times range from 15 minutes to many hours.
| Processing Technique | Equipment name & NEMO ID | Cleanliness | Materials Lab Supplied | Material Thickness Range | Substrate Size | Maximum Load (number of wafers) | Process Temperature Range | Gases | Stylus Tip Radius |
|---|---|---|---|---|---|---|---|---|---|
| Oxide Growth (furnace), Annealing (furnace) |
Tystar Bank 1 Tube 2 B1T2 Flexible Oxide |
Flexible |
25.00 Å -
2.00 μm
|
100 |
400 °C - 1100 °C
|