Stanford Nanofabrication Facility
Lab User Guide
Equipment Tables
| Equipment name & NEMO ID | Training Required & Charges | Cleanliness | Location | Notes |
|---|---|---|---|---|
|
Fiji 1 ALD fiji1 |
ALD Fiji 1 and 2 Training | Semiclean | SNF Paul G Allen L107 Cleanroom | |
|
Fiji 2 ALD fiji2 |
ALD Fiji 1 and 2 Training | Flexible | SNF Paul G Allen L107 Cleanroom | |
|
Fiji 3 ALD fiji3 |
ALD Fiji 3 Training | Flexible | SNF Paul G Allen L107 Cleanroom |
Restricted to non-conductive films only |
|
MVD mvd |
MVD Training | Flexible | SNF Paul G Allen L107 Cleanroom |
Reactor located inside glovebox |
|
Savannah ALD savannah |
ALD Savannah Training | Flexible | SNF Paul G Allen L107 Cleanroom |