Use a CVD process to grow single wall carbon nanotubes as well as vertical nano forest
| Processing Technique | Equipment name & NEMO ID | Cleanliness | Materials Lab Supplied | Substrate Size | Maximum Load (number of wafers) | Process Temperature Range | Gases | Notes | Stylus Tip Radius |
|---|---|---|---|---|---|---|---|---|---|
| Carbon Nanotube CVD Growth |
First Nano carbon nanotube CVD furnace cvd-nanotube |
Flexible | 1x4" wafer or multiple pieces |
800 °C - 1100 °C
|
Aligned single-walled carbon nanotube growth with ST-cut quartz substrates (available from SNF stockroom);1-15 single-walled carbon nanotubes per micron density |