Processing Technique Equipment name & NEMO ID Cleanliness Minimum Resolution Exposure Wavelength Substrate Size Mask Size Notes Stylus Tip Radius
Contact Aligner Karl Suss MA-6 Contact Aligner
karlsuss 		"All" 1.50 μm 365 nm
4 inch, 5 inch, 7 inch

1:1 Contact Aligner. Backside align, including IR.
Contact Aligner Karl Suss MA-6 Contact Aligner
karlsuss2 		"All" 1.50 μm 365 nm or 405 nm
4 inch, 5 inch, 7 inch

1:1 Contact Aligner. Backside align.