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Thermco3 Oxidation Furnace (thermco 3)


The top furnace in Thermco bank2 is the Thermco3 Furnace.

SNF staff

final shutdown & removal Feb/Mar 2024

Find the current project schedule and more information here.


Capabilities and Specifications

Cleaning Required: 
Pre-Diffusion Clean
Material Thickness Range: 25.0 Å - 2.0 μm
Process Temperature Range: 
700 °C - 1100 °C
Maximum Load: 

Dry and wet oxidation. Use calculator to determine growth rate. N2 annealing available.

Lab Organization, Location, and NEMO Information

NEMO Area: 
SNF: Annealing, Oxidation and Doping
thermco 3

Training and Maintenance

Lab Facility: 
Training Charges: 
1.00 hours
Primary Trainer: 
Primary Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
  3. Contact the primary trainer: Neel Mehta

Operating Instructions