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First Nano carbon nanotube CVD furnace (cvd-nanotube)


CVD-Nanotube The First Nano CVD furnace is dedicated to carbon nanotube synthesis and can accommodate multiple pieces or a 4" wafer. Methane, hydrogen and ethanol are available as process gases and thus provide versatility for both SWCNT growth as well as vertical forest growth. Process recipes for horizontally aligned SWCNT growth on ST-cut quartz (available from the SNF stockroom) have been optimized and are available to the user, with typical yields of 1-5 SWCNTs per micron depending on the catalyst used.


Capabilities and Specifications

Material Thickness Range: Å nm
Process Temperature Range: 
800 °C - 1100 °C
Maximum Load: 
1x4" wafer or multiple pieces

Aligned single-walled carbon nanotube growth with ST-cut quartz substrates (available from SNF stockroom);1-15 single-walled carbon nanotubes per micron density

Lab Organization, Location, and NEMO Information

Lab Organization: 
NEMO Area: 
nSiL: Cleanroom

Training and Maintenance

Lab Facility: 
Training Charges: 
3.00 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Study the relevant operating procedures:
  2. Contact the primary trainer: Neel Mehta

Operating Instructions