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B3H6
Chemical Formula:
B
3
H
6
Gases Equipment Tabs
Etch Equipment Table
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
Anneal/Oxidation Equipment Table
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
AMAT Centurion Epitaxial System
epi2
Clean
SNF Paul G Allen L107 Cleanroom
50.00 Å
-
3.00 μm
Ge
Si
SiGe
