Characterization is a broad term that is used to describe any method of analysis of properties of materials and devices. The various tools listed here will use different techniques to study a wide variety of properties.
| Processing Technique | Equipment name & NEMO ID | Cleanliness | Substrate Size | Maximum Load (number of wafers) | Stylus Tip Radius |
|---|---|---|---|---|---|
| Characterization | SPF Measurement Bench | ||||
| Ellipsometry |
Woollam woollam |
"All" | 1 |