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Characterization

Characterization is a broad term that is used to describe any method of analysis of properties of materials and devices. The various tools listed here will use different techniques to study a wide variety of properties.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Characterization	SPF Measurement Bench			SNF SPF Paul G Allen 138 SPF
Step Profile	Tencor P2 Profilometer p2	Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group.	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
Ellipsometry	Woollam woollam		All	SNF Cleanroom Paul G Allen L107

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Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes
Characterization	SPF Measurement Bench
Step Profile	Tencor P2 Profilometer p2	Clean, Semiclean	Pieces 2" 3" 4" 6" 8"	1	Step height measurement range 500 Å to 80 µm
Ellipsometry	Woollam woollam	All	Pieces 2" 3" 4" 6" 8"	1

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