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Direct Write

Technique Tabs

Main Tab

Processing Techniques	Equipment name & NEMO ID	Teaser Blurb	Cleanliness	Location
Direct Write	Heidelberg MLA 150 heidelberg	Maskless writer that patterns without prior fabrication of masks.	All	SNF Exfab Paul G Allen 104 Stinson
Direct Write	Heidelberg MLA 150 - 2 heidelberg2	Maskless writer that patterns without prior fabrication of masks.	All	SNF Paul G Allen L107 Cleanroom

Detail Tab

Processing Technique	Equipment name & NEMO ID	Cleanliness	Minimum Resolution	Exposure Wavelength	Substrate Size	Maximum Load (number of wafers)	Notes
Direct Write	Heidelberg MLA 150 heidelberg	All	1.00 μm	405 nm	Pieces 2" 3" 4" 6"	1	Direct Write
Direct Write	Heidelberg MLA 150 - 2 heidelberg2	All	0.60 μm	375 nm	Pieces 2" 3" 4" 6"	1	Direct Write